About Us

N2FC Cleanroom 1 (CR1) is one of the university’s cleanroom in Singapore equipped with a state-of-the-art clean room facility with 673 m2 of Class 100 landscapes area in total​.

The architecture layout of the clean room adopts the open space concept with two storeys of Cleanroom level and Subfab level whereby the latter one is located below the former counterpart. Cleanroom level is designed to house different process modules including Lithography Module, Wet Bench Module, Dry Etching Module, Diffusion and Ion Implantation Module, Thin Film Module and Metrology Module with various respective semiconductor equipment. Whereas for Sub-fab level, it is designed to house all the supporting facilities for the aforementioned cleanroom level equipment as well as Packaging and Dicing module.
Apparently, the major active research activities in CR1 involve silicon based microelectronics, nanoelectronics, silicon photonics areas as well as microelectromechanical (MEMS) area.​

Cleanroom 2 (CR2) is a class 10 and class 100 cleanroom with an area of 693 m2 dedicated for the fabrication of non-Si based micro- and nano-devices.

CR2 hosts a range of advanced fabrication equipment such as Metal Organic Chemical Vapor Deposition (MOCVD), Electron Beam Lithography (EBL) and other tools for micro- and nano-fabrication. This allows integration of new nano-devices and technologies for advanced ICs and systems.

Director's message

Welcome to Nanyang NanoFabrication Centre (N2FC) at the Nanyang Technological University (NTU) Singapore. N2FC is a shared research facility in the university housing state-of-the-art nano-fabrication facilities to provide university-wide support for nanoscience and nanotechnology research and education. N2FC was established to facilitate the fabrication of semiconductor devices, integrated circuits, as well as the research and development of nanotechnologies including nanoelectronics and nanophotonics, etc. It also allows researchers to explore new materials and technologies for emerging applications. We aim to provide a state-of-the-art micro- and nano-fabrication environment for researchers, graduate students, and professors in NTU. The Centre also fosters cooperation among NTU, research institutes and local industry in the related research areas. 

We are looking forward to working with you in the near future. 

 

Dr. Wang Hong

Associate Professor, School of Electrical & Electronic Engineering
Director, Nanyang NanoFabrication Centre (N2FC), School of Electrical & Electronic Engineering