CET765 Lithography Processes for Next Generation of Nano Scale Smart Devices

Course Provider

School of Electrical and Electronic Engineering (EEE)



Academic Unit



The objective of this course is to study the process development and integration related to lithography processing and technologies which are essential in advanced manufacturing.

This course is part of:

- Graduate Certificate in Electronics
- Graduate Certificate in 
Engineering Optics and Photonics
- FlexiMasters in  Electronics
FlexiMasters in Engineering Optics and Photonics


Download Learning Pathway e-Guide

At the end of the course, learners  are able to:

1. Expose to state-of-the-art advanced CMOS process technologies;

2. Explain the concepts of photolithography and determine the resolution of lithographic systems;

3. Describe the types of photoresists used in wafer manufacturing;

4. Discuss the optical enhancement techniques of sub-wavelength lithography and;

5. Explore alternatives of advanced lithography and the challenges involved in introducing each alternative into production.

Introduction to Semiconductor Processing

Lithography Processing

- Basic Concepts for Photolithography
- Process Overview
- Negative and Positive Lithography
- Critical Dimension Generation
- Light Spectrum
- Eight Basic Steps of Photolithography Process

Lithography Technology

- Purpose of Lithography, Resolution and its Critical Parameters
- Photolithograph Equipment
- Reticles and Photomasks

Resist Technology

- Purposed of Photoresist
- Components of Photoresist
- Metrics of Photoresist
- Deep UV Resists

Advanced Lithography

- Optical Resolution Enhancement Techniques for Sub-wavelength Lithography
- Immersion UV Lithography
- X-Ray Lithography
- E-beam Lithography
- Extreme UV Lithography
- Nano-imprint Lithography

For graduates, practicing engineers, R&D managers and technical staff who wish to gain in-depth technical knowledge in the area of semiconductor manufacture and microelectronics.

Standard Course Fee: S$1,635

SSG Funding Support

 Course fee

Course fee payable after SSG funding, if eligible under various schemes


BEFORE funding & GST

AFTER funding & 9% GST

Singapore Citizens (SCs) and Permanent Residents (PRs) (Up to 70% funding)



Enhanced Training Support for SMEs (ETSS)


SCs aged ≥ 40 years old
SkillsFuture Mid-career Enhanced Subsidy (MCES)
(Up to 90% funding)

  • Standard course fee is inclusive of GST.
  • NTU/NIE alumni may utilise their $1,600 Alumni Course Credits. Click here for more information.


Read more about funding


CET757 Digital Integrated Circuit Design I1
CET758 Digital Integrated Circuit Design II1
CET759 Digital Integrated Circuit Design III1
CET760 Advanced Topics in Semiconductor Devices I1
CET761 Advanced Topics in Semiconductor Devices II1
CET762 Advanced Topics in Semiconductor Devices III1
CET763 Advanced Wafer Processing I1
CET764 Advanced Wafer Processing II1
CET766 Analog Integrated Circuit Design I1
CET767 Analog Integrated Circuit Design II1
CET768 Analog Integrated Circuit Design III1
CET769 Integrated Circuit (IC) Packaging I1
CET770 Integrated Circuit (IC) Packaging II1
CET771 Integrated Circuit (IC) Packaging III1


Engineering Optics and Photonics

CET824 Basic Optical Engineering2
CET825 Fibre Lasers for Various Industry Applications1
CET826 Understanding Fibre Optic Distributed Network for IoT Infrastructure1
CET827 Fibre based Components for High Speed IoT Applications1
CET828 Understanding the Principles, Structures, Packaging, Installation and Signal Processing of Optical Fibre Sensing Technology1
CET829 Engineering Metrology1
CET830 Optical Fibre Design and Fabrication for High Power Laser and Telecommunication Applications1
CET831Lasers and Optics for Smart Manufacturing (I 4.0)- Current Practices and Future Prospects1
CET832 Laser Manufacturing Processes2
CET833 Organic Light Emitting Diode Technology for Flat Panel Information Displays1
CET834 Understanding of basic device structure and operating principles of displays and LEDs1
CET835 Laser Machining and 3D Printing for Industry0.5
CET836 Smart Optical Sensors for Smart Manufacturing0.5
CET837 Bio-imaging1

Listed courses are:

  • Credit-bearing and stackable to Graduate Certificate in Electronics, Graduate Certificate in Engineering Optics and Photonics (total 9AUs) and FlexiMasters in Electronics and FlexiMasters in Engineering Optics and Photonics (total 15AUs).
  • SSG funded and SkillsFuture Credit approved.