Electron matter interaction in SEM

SEM-matter interaction
The scanning electron microscope (SEM) is a ubiquitous tool of science whether the topic be medical or materials research, environmental or forensic problem solving and so on. At its most basic, SEM offers images with superior resolution and depth of field compared to light microscopy. In addition, by analyzing the various signals emanating from the specimen compositional and crystallographic information may be extracted. Most appealingly, basic operation of an SEM is readily mastered by users. FACTS operates 3 thermionic SEMs, 4 Field-Emission SEMs, 1 EPMA and 1 Environmental SEM for teaching and research.