XRD Bruker D8 Discover

FACTS XRD room at N4.1 B4-10

X-ray diffractometer for polycrystalline and single crystalline thin film samples


For high-resolution XRD (HRXRD) analysis, such as X-ray reflectivity and reciprocal space mapping. Other functions: GIXRD, pole figure data collection, residual strain/stress analysis.

  • Cu-Kα radiation operated at 40kV and 40mA 
  • Parallel beam profile
  • Monochromator (attachable)
  • High-precision horizontal goniometer attached with Euler cradle including an X-Y-Z motion
  • Sample stage can accommodate up to 4-inch wafer samples
  • Beam can be configured as point (1 mm) collimated
  • Detectors: 1) Lynxeye 1D, 2) Scintillation 0D
  • in-situ heating capability room temperature to 1100oC (Anton Paar DHS1100)
  • X-ray diffraction analysis of crystalline materials for phase ID, quantification, micro-structure analysis and crystal structure refinement/determination
  • X-ray reflectivity (XRR) analysis of thin films
  • Pole figure measurements for crystal orientation mapping and texture analysis
  • Reciprocal space mapping of epitaxial thin films
  • High-resolution XRD of single crystalline thin film and substrate
  • Grazing incidence XRD (GIXRD)
  • Residual stress analysis 
  • In-situ heating XRD