CET764 Advanced Wafer Processing II

Course Provider

School of Electrical and Electronic Engineering (EEE)



Academic Unit



The objective of the course is to study the process development and integration related to cleaning, polishing, characterization and dielectrics which are essential in CMOS IC manufacturing.

This course is part of:

- Graduate Certificate in Electronics
- FlexiMasters in Electronics

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At the end of the course, learners  are able to:

1. Expose to the state-of-the-art advanced CMOS process technologies;

2. Equip with the relevant techniques for cleaning and polishing;

3. Equip with the skills to design processing steps for cleaning in fabrication flow;

4. Understand the working principles for characterization techniques and;

5. Understand the important role of dielectrics in semiconductor devices, as well as the fabrication techniques to form dielectrics.

Cleaning Technology

- Types of Contamination
- Wet Cleaning Process
- Wet Cleaning Equipment
- Alternative to RCA Clean

Chemical and Mechanical

- Polishing Working Principle
- Equipment
- Process Concerns

Metrology and Analytical Techniques

- Optical Characterization
- Charge-Based Characterization
- Electron Beam Characterization
- Ion Beam Characterization

Dielectrics for CMOS technology

- Scaling Issues
- Technology
- Reliability

For graduates, practicing engineers, R&D managers and technical staff who wish to gain in-depth technical knowledge in the area of semiconductor manufacture and microelectronics.

Standard Course Fee: S$1,620

SSG Funding Support

Course fee payable after SSG funding, if eligible under various schemes

Fee BEFORE funding & GST

Fee AFTER funding & 8% GST

Singapore Citizens (SCs) and Permanent Residents (PRs) (Up to 70% funding)



Enhanced Training Support for SMEs (ETSS)


SCs aged ≥ 40 years old
SkillsFuture Mid-career Enhanced Subsidy (MCES)
(Up to 90% funding)

• NTU/NIE alumni may utilise their $1,600 Alumni Course Credits. Click here for more information.

    Read more about funding
    CET757 Digital Integrated Circuit Design I1
    CET758 Digital Integrated Circuit Design II1
    CET759 Digital Integrated Circuit Design III1
    CET760 Advanced Topics in Semiconductor Devices I1
    CET761 Advanced Topics in Semiconductor Devices II1
    CET762 Advanced Topics in Semiconductor Devices III1
    CET763 Advanced Wafer Processing I1
    CET765 Lithography Processes for Next Generation of Nano Scale Smart Devices1
    CET766 Analog Integrated Circuit Design I1
    CET767 Analog Integrated Circuit Design II1
    CET768 Analog Integrated Circuit Design III1
    CET769 Integrated Circuit (IC) Packaging I1
    CET770 Integrated Circuit (IC) Packaging II1
    CET771 Integrated Circuit (IC) Packaging III1

    Listed courses are:

    • Credit-bearing and stackable to Graduate Certificate in Electronics (total 9AUs) and FlexiMasters in Electronics (total 15AUs).
    • SSG funded and SkillsFuture Credit approved.