Group facility
Thin film deposition:
1. UHV magnetron sputtering deposition system
2. Metal growth UHV molecular beam epitaxy system (developing, to be
complete in June 2009 )
3. Riber Compact 21 UHV III-V semiconductor molecular beam epitaxy system
4. Pulsed electrodeposition system
Characterisation:
1. Magneto-optical Kerr magnetometry
2. MR measurement setup
3. Test and measurement probe station
Microfabrication:
1. Class 100-100k cleanroom
2. Acid and solvent chemical processing benches
3. Suss mask aligner MJB4
4. Nikon advanced optical microscope
5. Quorum Technology oxygen plasma barrel etcher
6. Edwards 306 thermal and e-beam evaporation system
Division central facility:
1. Veeco scanning probe microscope
2. JEOL scanning electron microscope
3. Bruker X-ray diffractometer
Magnetron
Sputtering System Riber
Compact 21 III-V MBE System

