Semiconductor Process Emulation with TCAD
(E039 -- 1996/97, 20 students)
In this project, basic semiconductor processing steps, such as diffusion,
oxidation, ion implantation, will be simulated using technology-CAD (TCAD)
tools, from which a simple device (diode, capacitor) will be "fabricated"
and characterized. The students will not only gain practical experience
in using the state-of-the-art simulation tools in virtual wafer fabrication,
but also reinforce their knowledge in semiconductor process and devices.