In-House Practical Training


Semiconductor Process Emulation with TCAD

(E039 -- 1996/97, 20 students)


In this project, basic semiconductor processing steps, such as diffusion, oxidation, ion implantation, will be simulated using technology-CAD (TCAD) tools, from which a simple device (diode, capacitor) will be "fabricated" and characterized. The students will not only gain practical experience in using the state-of-the-art simulation tools in virtual wafer fabrication, but also reinforce their knowledge in semiconductor process and devices.