High Speed and High Precision Linear Motor Drive

• Abstract
  

• Genetic Algorithm for Controller
  

• Experimental Results of Linear Step Cycle Test
  

• Experimental Results of Quasi-pilgrim Cycle Position Test
  

• Friction Dynamic Modeling
  

• Experimental results of 30cm Setpoint Profile Tracking
  

• Experimental results of 20mm Setpoint Profile Tracking
  

• Experimental results of 10 um Setpoint Profile Tracking
  

• Experimental Setup of XY Table in Future work